KYOSAN 2L39-000104-V1 Generator
Product Manual：
KYOSAN 2L39-000104-V1 RF Generator
Introduction: KYOSAN 2L39-000104-V1 semiconductor specific RF generator has balanced power output and sensitive regulation, suitable for long-term plasma process production in coating and etching chambers.
Closed loop power regulation, small output power fluctuations, and good process consistency
Real time monitoring of reflected power, automatic optimization of output matching status
Integrated multiple protections for overcurrent, overvoltage, overheating, and abnormal load
Modular body structure, convenient disassembly and maintenance of faulty components
Status lights display standby, running, and fault alarm information in different zones
Suitable for various semiconductor vacuum process equipment, with strong universality
Fast power switching response, suitable for multiple production process loads
Power on machine self-test, quickly identify circuit and hardware faults
Industrial standard power supply, suitable for use in dust-free and temperature controlled workshops
Compact integrated design, reducing the internal space occupation of equipment
All metal sealed shell, dustproof and resistant to trace corrosive gases in the workshop
Supports industrial communication protocols and can remotely interface with device control systems
Local storage of multiple sets of process parameters, no need to reset when switching processes
Automatically retain fault operation records for later maintenance and troubleshooting
Original high-quality components with low failure rate during long-term continuous operation
Conclusion: This RF generator has complete protection and a wide range of process adaptability, making it a core spare part for semiconductor plasma vacuum equipment.
Product detailed pictures：
2L39-000104-V1
product video
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