KYOSAN EAK2T 3M39-000028-12 matching controller  

Product Manual：

KYOSAN EAK2T 3M39-000028-12 matching controller
Introduction: KYOSAN EAK2T 3M39-000028-12 semiconductor RF dedicated matching controller, automatically adjusts impedance, stabilizes plasma process.
High speed automatic impedance tuning, quickly matching load changes
Good reflection power suppression effect and high RF transmission efficiency
Digital precise control, stable process power output
Built in multiple protections against overcurrent, overvoltage, and overheating
Real time collection of power data, synchronized upload to the main control of the machine
Metal shielded body to resist electromagnetic interference in the workshop
Original factory standard communication interface, compatible with TEL etching equipment
Equipped with built-in fault self check, instant alarm prompt for abnormalities

Industrial wide temperature element device, suitable for high temperature working conditions of machines
Strengthen the internal structure to prevent equipment from easily malfunctioning due to vibration
Surface anti-corrosion and dustproof, suitable for clean workshop environment
Store multiple sets of process matching parameters and call them with one click
Standard rack size, no need to change wiring for disassembly and replacement
Low power consumption operation, low heat generation during long-term operation
Factory complete aging test, low failure rate during continuous operation
Conclusion: KYOSAN EAK2T 3M39-000028-12 has precise matching and complete protection, ensuring stable RF plasma process and reducing production line downtime for maintenance.

Product detailed pictures：

EAK2T 3M39-000028-12

product video

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