Kyosan Electric 0190-64462 RF Generator
Product Manual：
Kyosan Electric 0190-64462
1. Supporting semiconductor coating and etching equipment generates radio frequency energy
2. Ionizing process gas forms stable plasma for processing
3. Real time monitoring of forward and reflected power, automatic adaptation to cavity load
4. Accurately adjust the output power to ensure stable and consistent process parameters
5. Automatic locking protection during overheating, standing wave abnormality, and overload
6. The body has excellent heat dissipation and can operate continuously in mass production for a long time
7. Anti workshop electromagnetic interference, operation signal is not easily affected
8. Remote setting of start stop and power for the main control system of the docking equipment
9. Good harmonic suppression effect, clean and stable output waveform
10. Modular construction, quick disassembly and replacement of faulty machines
11. Adapt to the strict clean environment operation requirements of dust-free workshops
12. High precision power regulation improves wafer yield
13. Comes with operation data records for easy troubleshooting and maintenance
14. Suitable for sputtering coating and cavity plasma cleaning processes
15. Daily maintenance only requires checking the wiring and cooling air ducts
Summary: Kyosan Electric 0190-64462 is a semiconductor process specific RF generator that stably supplies RF energy to excite plasma, ensuring smooth production of wafer coating and etching processes.
Product detailed pictures：
product video
Other links
PFV0-102 servo motor
P110-6052 contactor
3BHE014070R0101 Drive Control Board
Other links
DEIF PPU-3 Control processor
PCD231B101 3BHE025541R0101 controller
PROSOFT 6104-WA-PDPM Communication module
