LAM 853-049542-173 Temperature Control Component
Product Manual：
LAM 853-049542-173 is a temperature control component of the Panlin etching equipment, which controls the temperature of the process chamber partition
1. LAM 853-049542-173 is compatible with LAM TCP series 12 inch etching machine, original direct installation
2. Multi channel independent temperature control, adjusting the temperature of the electrostatic chuck and various areas of the cavity
3. Built in PID algorithm, with minimal temperature fluctuations to ensure even wafer processing
4. Collect multiple temperature sensing signals and provide real-time feedback on temperature data
5. Isolation of strong and weak electrical lines to resist plasma RF interference
6. Gold plated backplate connector, stable contact after long-term insertion and removal
7. Equipped with channel indicator light, quickly locate temperature control abnormalities
8. Integrated over temperature and over-current protection to prevent damage to cavity components
9. High temperature resistant PCB board, suitable for long-term continuous production in clean rooms
10. Modular plug-in structure, easy disassembly, replacement, and maintenance
11. Metal shielding shell, suppressing electromagnetic clutter in the workshop
12. Power on automatic self check, verify all temperature measurement channels
13. Board anti-corrosion coating, resistant to trace process corrosive gases
14. Multi protocol communication, real-time interaction parameters with device master control
15. Industrial grade components, 7 × 24-hour production line operation durable
Conclusion: LAM 853-049542-173 has precise temperature control and strong anti-interference, and is the core temperature control component of semiconductor etching equipment
Product detailed pictures：
853-049542-173
product video
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