MITSUBISHI MR-MC01-S100 Controller Module

Product Manual：

The MITSUBISHI MR-MC01-S100 controller module is a precision motion control unit dedicated to semiconductor TEL equipment. The MITSUBISHI MR-MC01-S100 controller module controls the precise positioning of wafer handling axes and has 15 features:
Servo axis closed-loop control, high positioning accuracy without offset
Support S-curve acceleration and deceleration, and prevent vibration and collision during wafer handling
Multi axis synchronous linkage, adapted to the movements of the platform and robotic arm
Limit and emergency stop signal acquisition, equipment operation safety interlock
Dedicated equipment bus, high-speed and stable communication with the main control
Signal isolation circuit, shielding cavity RF interference
Built in multiple protections for overcurrent, overvoltage, and overload

Fault code indicator light, quick troubleshooting for abnormal movement
Flash storage parameters, power-off configuration not lost
Standard card structure, easy disassembly and replacement of cabinet rails
Compact board layout, saving chassis installation space
Sinking gold solder pads, long-term insertion and removal are not easy to oxidize and have stable contact
Equipped with signal filtering to eliminate electromagnetic clutter interference
Wide temperature stable operation, suitable for dust-free clean workshops
Factory calibration of the entire machine, directly matched with the handling system on the machine
MITSUBISHI MR-MC01-S100 controller module operates smoothly and reliably, and core control components are replaced for semiconductor wafer transmission equipment maintenance

Product detailed pictures：

MR-MC01-S100

product video

Other links

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