MKS 153F-16205 Intelligent Controller
Product Manual：
The MKS 153F-16205 intelligent controller is an integrated pressure control unit for semiconductor vacuum machine throttle valves. The MKS 153F-16205 intelligent controller is used for vacuum pressure closed-loop regulation of etching and thin film equipment. There are 15 product features:
Integrated 253 throttle valve drive circuit, no need for external control box
Support dual mode precise closed-loop control of pressure and valve position
Equipped with digital PID algorithm, the vacuum pressure regulation response is fast
RS232 digital communication+analog voltage dual setting input
15-30VDC wide DC power supply, compatible with 15/24/28V cabinet power supply
Non volatile storage for power-off, saving calibration parameters and valve positions
Machine side dip switch, switch valve forward and backward action logic
Manual locking switch, fixed valve position during maintenance does not change with signal
On/off position indicator light, visually judge the valve limit state
Directly connected vacuum pressure gauge, real-time collection of chamber pressure signals
Low power overall design, with an operating power of only about 6W
Integrated compact structure, vacuum pipeline installation saves space
Built in overload protection to prevent damage to the motor drive circuit
Suitable for clean processes and resistant to low corrosion process gas environments
Factory calibration of the entire machine, directly matched with the vacuum system on the machine
MKS 153F-16205 intelligent controller for stable pressure control, maintenance and replacement of core pressure control components for wafer vacuum process equipment
Product detailed pictures：
153F-16205
product video
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