MKS 253B-31797 throttling butterfly valve
Product Manual：
MKS 253B-31797 throttling butterfly valve is used for precise adjustment of vacuum chamber pressure and is suitable for semiconductor vacuum equipment.
1. Linear flow regulation, stable and non fluctuating air pressure control
2. 316 stainless steel valve body, corrosion-resistant and compatible with process gases
3. The sealing leakage rate is extremely low, and the high vacuum working condition is stable
4. The motor has a fast response speed and the switch action is fast
5. High resolution adjustment, precise control of small air pressure
6. Equipped with MKS dedicated controller, high communication compatibility
7. MKS 253B-31797 throttling butterfly valve flange standard, easy to disassemble and replace
8. Built in gear drive, sufficient output torque
9. Wide temperature working range, reliable long-term continuous operation
10. Extremely low external leakage rate, meeting dust-free vacuum standards
11. The butterfly structure is compact, and the pipeline occupies less space
12. Seismic reinforcement structure, production line vibration is less prone to failure
13. No need for frequent calibration, good process repeatability
14. Suitable for various types of vacuum pumps, with adjustable exhaust flow rate
15. MKS 253B-31797 throttling butterfly valve has simple maintenance and convenient replacement of spare parts
MKS 253B-31797 throttling butterfly valve has high pressure control accuracy and is the core pressure regulating component of wafer vacuum process.
Product detailed pictures：
253B-31797
product video
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