MKS 683B-25580 Digital Exhaust Throttle Valve
Product Manual：
MKS 683B-25580 digital exhaust throttle valve integrated control module, stable vacuum chamber pressure regulation, suitable for semiconductor vacuum processes.
1. Integrated electronic control structure, no need to pair with external controller
2. The second-generation PID algorithm has fast voltage regulation and small overshoot
3. Valve control has high resolution and fine linear pressure regulation
4. Comes with two alarm outputs and status indicator lights
5. Support switching between pressure and valve position control modes
6. Digital communication transmission, anti workshop electromagnetic interference
7. Valve body made of 316 stainless steel material, resistant to process gas corrosion
8. Multiple materials are available for sealing, suitable for high temperature conditions
9. Directly connected gear drive, fast response speed of switch valve
10. Extremely low leakage rate, meeting the requirements of high vacuum processes
11. Equipped with soft start function to reduce particle disturbance inside the cavity
12. Supports DeviceNet bus, easy to integrate with industrial control systems
13. Valve body wide temperature operation, stable temperature control of electronic components
14. Standard ISO flange, easy to install and disassemble
15. Real time monitoring of valve position and pressure for easy troubleshooting
The MKS 683B-25580 digital exhaust throttle valve has precise control and high integration, and is the mainstream pressure control valve for vacuum coating and semiconductor equipment.
Product detailed pictures：
683B-25580
product video
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