MKS 683B-29016 throttle control valve
Product Manual：
The MKS 683B-29016 throttle control valve is used for precise pressure regulation of vacuum chambers and is commonly used in semiconductor vacuum process equipment.
1. Integrated drive control unit, no need for external independent controller
2. Built in PID regulation, rapid pressure control response
3. Supports two modes: pressure closed-loop and valve position control
4. High precision valve position adjustment, continuous and smooth flow adjustable
5. Good linearity adjustment, stable changes in chamber pressure
6. Equipped with digital communication, stable signal transmission and anti-interference
7. Equipped with programmable alarm points and supporting safety interlock
8. The valve body is made of stainless steel material and can withstand various process gases
9. Excellent sealing performance, leakage rate meets high vacuum requirements
10. Gear driven structure, stable and reliable action response
11. Control parameters can be customized and adapted to various vacuum systems
12. Real time monitoring of operational status for easy troubleshooting
13. Standard flange interface, convenient pipeline installation
14. Suitable for long-term continuous work, with excellent process repeatability
15. Soft start regulation reduces airflow disturbance and particle generation
The MKS 683B-29016 throttle control valve is commonly used in precision vacuum equipment such as vacuum coating and semiconductor processes.
Product detailed pictures：
683B-29016
product video
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