MKS 925-11004-0087 Sensor
Product Manual：
MKS 925-11004-0087 Sensor
MKS 925-11004-0087 is a MEMS micro Pirani vacuum pressure sensor used for semiconductor cavity vacuum monitoring
1. MEMS silicon chip sensing, pressure measurement based on gas thermal conduction principle
2. Range 1 × 10 ⁻⁵ Torr to atmospheric pressure, covering the range from coarse vacuum to atmospheric pressure
3. Installation at any angle, placement posture does not affect measurement accuracy
4. Anti vibration, anti intake shock, not easily damaged sensing chip
5. KF16 standard stainless steel vacuum flange, compatible with wafer equipment pipelines
6. Vacuum contact surface made of 304 stainless steel, suitable for dust-free workshops with low gas release
7. Analog voltage output+RS232 digital dual communication, docking with device master control
8. Built in three-way pressure threshold relay to achieve pump valve interlock control
9. Fast response speed, real-time feedback of pressure changes to meet process interlocking requirements
10. Equipped with gas coefficient correction, suitable for various process corrosive gases
11. Metal shielding shell, resistant to cavity RF interference without reading drift
12. The whole machine is miniaturized, and the small cavity can also be installed and fixed
13. Lead free and environmentally friendly structure, compliant with RoHS clean production standards
14. Power off can bake at 85 ℃, suitable for high-temperature degassing maintenance in the chamber
15. Factory multi-point calibration, stable and traceable measurement data
In summary, MKS 925-11004-0087 has a wide range, anti-interference and seismic resistance, and is the core component for vacuum pressure monitoring of etching and coating equipment
Product detailed pictures：
925-11004-0087
product video
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