MKS ESW0090-06455V Controller Rack
Product Manual：
MKS ESW0090-06455V Controller Rack
Introduction: MKS ESW0090-06455V is a modular controller installation rack specifically designed for vacuum equipment, which houses various flow meters and pressure control cards in a centralized manner.
Standard modular slot, capable of parallel installation of multiple control cards
Integrated power supply backplane, providing unified power supply for internal card components
Internal circuit shielding to reduce RF signal interference in the cavity
Air duct heat dissipation structure, less prone to heat accumulation and temperature rise during full load operation
Metal reinforced shell, earthquake resistant and dust-proof, suitable for clean workshops
Backplane integrated with multiple signal buses, card communication interoperability
Equipped with a fault indicator light, quickly identify abnormal slots
Standardized cabinet size, embedded in equipment chassis without modification
Partition independent power supply, single card failure does not affect the whole machine
Plug in installation design, no need to disassemble the rack to replace the card components
Corrosion resistant metal coating, not easy to rust after long-term use
Reserve external communication ports to interface with the machine’s main control system
Support continuous operation of 7 × 24-hour semiconductor production lines
The internal wiring is regular, making it easy for daily maintenance and repair
Compatible with MKS series vacuum pressure and flow control components
Conclusion: MKS ESW0090-06455V has high integration and strong scalability, and is a core installation and load-bearing spare part for semiconductor vacuum process equipment.
Product detailed pictures：
ESW0090-06455V
product video
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