MKS002-4616-2D2 gas analyzer
Product Manual：
MKS 002-4616-2D2 Gas Analyzer
Introduction: MKS 002-4616-2D2 is an online gas monitoring analyzer for semiconductor equipment, used for real-time detection of process gas components, and is a spare part for the machine.
002-4616-2D2 multi-component synchronous detection, accurately identifying various process gases
The detection range covers ppb to percentage, and the detection of trace impurities is sensitive
High speed sampling response, real-time feedback on changes in chamber gas concentration
Built in anti-interference shielding structure, resistant to plasma electromagnetic environment
Multi stage gas path filtration, suitable for high-purity corrosive process gases
Comes with self checking program, automatically verifies device status upon startup
Multi channel standard communication interface, connected to the main control system of the equipment
Independent safety interlock, automatic output of gas abnormality alarm signal
Integrated compact body, space saving for machine cabinet installation
High temperature resistant chamber components, suitable for semiconductor high and low temperature processes
Low consumable design, long maintenance cycle, and low operation and maintenance costs
Panel indicator light zoning display, quickly locate air and circuit faults
Built in multiple pressure and temperature overload protection
The standard gas calibration is completed at the factory, and it is directly put into production for use on the machine
Metal dustproof and anti-corrosion shell, suitable for dust-free clean workshop working conditions
Conclusion: MKS 002-4616-2D2 is widely used for gas path monitoring of etching and deposition equipment, with stable and reliable measurements.
Product detailed pictures：
MKS002-4616-2D 2
product video
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