Newport 0190-22248 Wafer Robot

Product Manual：

Newport 0190-22248
1. Used for automatic handling of 300mm wafers in coating equipment
2. The robotic arm has precise positioning to prevent wafer collision and damage
3. Anti static design to prevent static electricity from damaging wafer chips
4. Capable of stably completing the removal and placement of chips inside the vacuum chamber
5. Automatically execute the loading and unloading process according to the device program
6. Configure sensing device to detect wafer grasping status
7. Automatic shutdown protection equipment for abnormal operation and overload
8. Low work vibration, will not affect the coating processing inside the cavity
9. The overall clean structure meets the standards for use in dust-free workshops

10. Support unified scheduling and control of access device main control system
11. The arm material is corrosion-resistant and suitable for the process chamber environment
12. Can carry out uninterrupted cyclic handling operations around the clock
13. Unified interface specifications, easy disassembly and replacement after faults
14. Daily maintenance only requires checking the clamp and wiring
15. Mainly used in supporting semiconductor sputtering coating production lines
Summary: Newport 0190-22248 is a semiconductor specific wafer handling robot that achieves precise wafer transfer in a dust-free vacuum environment, ensuring stable and automated operation of the production line.

Product detailed pictures：

0190-22248

product video

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