Nikon 2S005-228-3 Controller
Product Manual：
Nikon 2S005-228-3 is a motion controller for Nikon lithography machines, with precise positioning and stable operation. Its features are as follows:
1. Nikon 2S005-228-3 plug-in card structure, easy to disassemble and replace cabinet
2. Multi axis synchronous control, high synchronization of wafer platform positioning
3. High precision closed-loop feedback, minimal photolithography alignment error
4. Fast computation response, no lag or lag in start stop switching
5. Built in signal filtering to resist electromagnetic interference from the cavity
6. Integrated multiple safety protections for overcurrent, overheating, and emergency stop
7. Gold plated contacts, dust-free workshop for long-term use, not easily oxidized
8. Isolation of strong and weak electrical zones, with signals not interfering with each other
9. Onboard fault indicator light, quickly locate abnormal points
10. Industrial grade chip, running continuously and stably 24/7
11. Compatible with Nikon i-line series stepper lithography machines
12. Store multiple sets of motion programs and switch processes with just one click
13. Anti static board surface, less likely to damage the chip during maintenance
14. Optimize thermal conductivity wiring for lower temperature rise under high loads
15. Control the execution mechanism of crystal cone, shading plate, etc
ending
The Nikon 2S005-228-3 controller has strong synchronization performance and high accuracy, and is the core motion control component of semiconductor lithography equipment.
Product detailed pictures：
2S005-228-3
product video
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