Nikon 4S013-373-3 Linear Motor Controller
Product Manual：
Nikon 4S013-373-3 Linear Motor Controller
1. Compatible with Nikon NSR lithography machine platform, driving WX axis linear motor
2. Position closed-loop control, high positioning accuracy level
3. High speed dynamic response to meet the needs of wafer scanning motion
4. Support dual mode switching control of speed and position
5. Built in multiple protections, overcurrent, overvoltage, and overheating alarm
6. Real time reading of encoder feedback signal
7. High speed communication and interaction with the main control system of the lithography machine
8. Rack mounted unit, plug-in installation of cabinet
9. Comes with fault diagnosis and outputs fault codes
10. Smooth motion curve to reduce platform vibration
11. Air cooled cooling, suitable for long-term mass production and operation of equipment
12. Support parameter local read-write debugging
13. Anti interference design ensures stable operation of the lithography workshop
14. Status indicator light, convenient for on-site troubleshooting
15. Standardized interface, easy replacement and disassembly of spare parts
Nikon 4S013-373-3 linear motor controller provides precise motion drive for the lithography machine worktable, ensuring wafer exposure positioning accuracy
Product detailed pictures：
4S013-373-3
product video
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