NIKON 4S589-551 concentration meter device
Product Manual:
NIKON 4S589-551 Acid Concentration Meter Device
Introduction: NIKON 4S589-551 is a specialized acid concentration detection device for semiconductor lithography and etching equipment, which monitors the concentration of the chemical solution in real time to ensure process stability.
Fast detection response speed, real-time feedback of concentration values
High precision detection probe with small measurement error
Acid and alkali resistant anti-corrosion material, suitable for strong corrosive chemicals
Equipped with a constant temperature structure to eliminate temperature detection deviations
Digital signal output, connected to the main control system of the equipment
Automatic alarm for excessive concentration to avoid process abnormalities
Built in self calibration program, easy maintenance and operation
Small integrated structure, easy to install inside the machine
Multiple leak proof sealing design to prevent liquid leakage
Anti workshop dust and water vapor interference, stable operation
Support long-term continuous online monitoring
Visual data display, intuitive viewing of parameters
Fault self checking function, quickly identify abnormal points
Standard pipeline interface, easy to disassemble and replace
Compatible with Nikon semiconductor lithography and etching machines
Conclusion: NIKON 4S589-551 has precise measurement, anti-corrosion and durability, and is a core testing spare part for semiconductor wet process.
Product detailed pictures:

4S589-551
product video
Other links
REF542plus 1控制面板
ICS TRIPLEX 9802 3控制器
ICS TRIPLEX 9100处理器模块
Other links
B&R 4E0011.01-090 Button Panel
Chromalox 3204-71001 Temperature Controller
Teknic SST-6000-UCX Digital AC Servo Drive