Nikon S9037-0902N Image Sensor  

Product Manual：

Nikon S9037-0902N Image Sensor
Introduction: Nikon S9037-0902N is a CCD image sensor manufactured by Hamamatsu, compatible with Nikon ArF immersion lithography machine, used for 193nm ultraviolet alignment detection.
Back illuminated FFT-CCD architecture with high ultraviolet quantum efficiency
512 × 4 effective pixels, pixel size 24 × 24 μ m, uniform detection imaging
10MHz high-speed pixel readout, with a maximum line scan rate of 16300 lines per second
Suitable for 193nm excimer laser, quartz window has excellent UV transmittance
Support pixel merging Binning mode to improve signal-to-noise ratio and reading speed
Low dark current, low readout noise, clear acquisition of weak lithography signals
Window free customized packaging, suitable for clean light path environment inside lithography machines
Built in on-chip broadband amplifier, stable signal amplification without distortion

Spectral coverage of 200-1100nm, balancing UV and visible light detection
Metal sealed packaging, dustproof and moisture-proof, suitable for dust-free lithography workshop
MPP noise reduction working mode reduces imaging clutter interference
Original factory standard pin definition, can directly replace spare parts of the same model
Anti vibration reinforced structure, machine high-speed scanning imaging without offset
Real time image data output, docking machine alignment control system
Industrial long-life photosensitive chip, supporting continuous exposure of equipment for 7 × 24 hours
Conclusion: The Nikon S9037-0902N ultraviolet imaging is precise and has fast reading speed, making it the core alignment photosensitive component of Nikon immersion lithography machines.

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S9037-0902N

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