NM05S400KT-02X RF Matching Box
Product Manual：
NM05S400KT-02X RF Matching Box
Introduction: NM05S400KT-02X is a specialized automatic RF matching box for semiconductor plasma equipment, suitable for 400W power RF power supply.
Automatic fast impedance matching, fast adjustment response speed
Standard 50 Ω impedance, reducing RF reflection power
Adapt to 13.56MHz commonly used process RF frequency band
Built in vacuum variable capacitor, high matching accuracy
Air cooled cooling structure, no high temperature during long-term operation
N-type standard RF interface, simple disassembly and wiring
Real time detection of forward and reflected power values
Multiple safety protections for over power and over temperature
Digital signal communication, compatible with the entire machine control system
Anti electromagnetic interference, suitable for clean workshop working conditions
Small and compact body, installed nearby the cavity
Continuous full power stable operation, compatible with mass production lines
Equipped with fault self check and automatic alarm for abnormalities
Supporting handheld controller, on-site manual parameter adjustment
Universal among devices of the same series, with good compatibility for replacement
Conclusion: NM05S400KT-02X is an efficient, stable, and durable RF matching spare part for etching and coating equipment.
Product detailed pictures：
NM05S400KT-02X
product video
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