Novellus 01-8146070-00 Digital Controller
Product Manual：
Novellus 01-8146070-00 Digital Controller
Introduction: Novellus 01-8146070-00 manages digital signals of thin film equipment, ensuring stable operation
High speed processing of process digital signals, fast command response
Optoelectronic isolation circuit to resist electromagnetic interference in the workshop
Multiple IO channels, collecting valve and sensor status
Industrial wide temperature components for long-term continuous operation in clean rooms
Short circuit and overcurrent automatic protection, not easily damaged
Rack mounted plug-in card, easy to disassemble and replace
Fault indicator light, quickly locate abnormal points
Original factory dedicated bus, smooth communication with the host
Multi channel synchronous control of multi cavity actions
Low power design, low heat generation during long-term operation
Standard pin interface, no need to change the circuit for replacement
Support storing multiple sets of production process formulas
Anti vibration structure, the machine’s start and stop signals are not chaotic
Comes with running logs for easy fault tracing
This Novellus 01-8146070-00 is compatible with Novalus coating equipment
Conclusion: Integrated equipment digital control signals, Novellus 01-8146070-00 semiconductor dedicated control spare parts
Product detailed pictures：
01-8146070-00
product video
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