Novellus 02-252395-00 Digital Power Control System  

Product Manual：

Novellus 02-252395-00 Digital Power Control System
Novellus 02-252395-00 is a dedicated power control unit for semiconductor CVD deposition equipment
Digital closed-loop regulation of power supply output, high power control accuracy
Synchronized output of multiple power channels, matching chamber heating and RF loads
Built in electromagnetic filter to resist electromagnetic interference in clean workshops
Multi class industrial communication interfaces, connected to the main control system of the entire machine
Real time collection of voltage and current data, dynamic correction of output parameters
Built in hardware fault self check, quick alarm for overload abnormalities
Industrial wide temperature body, suitable for long-term continuous operation of equipment
All metal sealed shell, dustproof and moisture-proof, delaying aging

Multiple overvoltage, overcurrent, and overheating safety protection circuits
Standard cabinet installation size, easy disassembly and replacement
Large capacity storage, storing multiple sets of process power formulas
Seismic reinforcement of internal structure to withstand production line vibration conditions
Signal electrical isolation reduces the risk of equipment short circuit faults
Perfectly compatible with Novellus’ entire range of thin film deposition wafer equipment
Summary: The Novellus 02-252395-00 digital power control system has precise control and complete protection, and is the core power control component of semiconductor thin film process equipment.

Product detailed pictures：

02-252395-00

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