Novellus 02-293447-00 Digital Dynamic Controller

Product Manual：

Novellus 02-293447-00 digital dynamic controller adapted for Nofa semiconductor thin film deposition equipment
1. Synchronize the transmission and reception of multiple digital signals to control the actions of chamber valves and sensors
2. Optocoupler isolation circuit to resist radio frequency electromagnetic interference
3. Independent channel overcurrent protection, single channel fault does not stop the machine
4. Gold plated interface, stable long-term plug and unplug contact
5. Real time dynamic closed-loop adjustment of process action timing
6. Built in signal filtering to eliminate clutter signal deviation
7. Reinforce patch components to withstand continuous machine vibration

8. Clean grade circuit board, suitable for dust-free workshops
9. Onboard heat dissipation through holes, low temperature rise during long-term operation
10. Moisture resistant solder mask coating, delaying the aging and corrosion of the circuit
11. Built in fault self check, quickly locate communication abnormalities
12. Standard rack slot, can be directly replaced without changing the wiring
13. Native matching with Novellus original device communication protocol
14. Wide temperature tolerance, suitable for the cold and hot cycling environment of the cavity
15. Modular design, easy maintenance and replacement
Novellus 02-293447-00 digital dynamic controller accurately controls the digital action signals of the cavity, ensuring stable mass production of thin film processes

Product detailed pictures：

02-293447-00

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