Novellus 02-351554-00 Dynamic Controller
Product Manual：
Novellus 02-351554-00 Dynamic Controller
Introduction: Novellus 02-351554-00 is a specialized dynamic controller for thin film deposition equipment, which controls the adjustment of process dynamic parameters of the equipment.
Fast processing speed and real-time adjustment of dynamic parameters
Multi channel signal acquisition channel for synchronous monitoring of process data
Multi type communication interface, connected to the main control system of the whole machine
Optoelectronic isolation circuit to resist electromagnetic interference in the workshop
Built in multiple protections for overvoltage, overcurrent, and static electricity
Modular slot design, easy and quick disassembly and replacement
Equipped with a status indicator light for quick fault location and troubleshooting
Compatible with multiple Novellus coating process equipment, original matching
Wide temperature board material, suitable for continuous operation environment in the workshop
Local storage of process logs for easy traceability and maintenance of anomalies
Small and compact version, reducing cabinet space occupation
Gold plated terminal block, reliable connection in long-term vibration environment
Support online firmware updates to reduce downtime for maintenance
Original high-quality components, supporting 7 × 24-hour operation
Can be paired with accessories of the same series to expand equipment control functions
Conclusion: The Novellus 02-351554-00 dynamic controller precisely regulates the equipment process status to ensure stable operation of the semiconductor coating production line.
Product detailed pictures：
02-351554-00
product video
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