NOVELLUS SYSTEMS YSC-BSA01038PLOS / 02-294832-00
Product Manual:
NOVELLUS YSC-BSA01038PLOS / 02-294832-00
NOVELLUS YSC-BSA01038PLOS/02-294832-00 is a dedicated control board for semiconductor deposition equipment (CVD/PVD).
Novellus 02-294832-00 original board, compatible with Novellus (now Lam) deposition equipment.
Responsible for process logic, I/O control, and signal acquisition.
Industrial grade design, stable long-term continuous operation.
Integrate multi-channel analog/digital interfaces to adapt sensors and actuators.
Support device hot plugging and easy maintenance.
Metal shielding, strong anti-interference ability.
Wide temperature work, suitable for clean room environment.
Equipped with power-off parameter protection, data is not lost.
Built in fault self check and alarm function.
Standard rack installation, compact structure.
Multi protocol communication, easy to access Fab system.
Compatible with 300mm wafer process, high production capacity.
Used for core process segments such as etching and deposition.
Global production line validation with low failure rate.
NOVELLUS YSC-BSA01038PLOS/02-294832-00 is a key control component of sedimentation equipment.
Product detailed pictures:

YSC-BSA01038PLOS / 02-294832-00
product video
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