PROTEUS INDUSTRIES 9LDSCO-AMDN1 Leak Detector
Product Manual：
MKS GS53-F05F07-HT vacuum pump actuator assembly
MKS GS53-F05F07-HT is a high-temperature pneumatic actuator component for semiconductor vacuum pipelines, which controls the on/off of vacuum pump pipelines
1. Spring reset structure, automatically closing the pipeline when gas is cut off
2. Compatible with F05 and F07 specification vacuum ball valves
3. High temperature resistant seal, suitable for heating chamber working conditions
4. Corrosion resistant aluminum alloy body, clean and free of precipitation
5. Corrosion resistant fluororubber seal, compatible with process gases
6. 90 degree precise switch, adjustable travel range
7. Comes with valve position feedback, can upload switch signals to the main control
8. Compatible with standard clean compressed air drive
9. The valve position signal is stable and resistant to radio frequency interference without misoperation
10. Dust free production process, suitable for wafer workshops
11. Integrated bracket, convenient disassembly and assembly of pipelines
12. Seismic resistant transmission structure, not prone to valve jamming during long-term operation
13. Double sealed structure, good vacuum sealing performance
14. Fast switch response to meet process interlocking requirements
15. Compliant with industrial safety regulations, commonly used in etching and coating equipment
In summary, MKS GS53-F05F07-HT is a key component for vacuum pump pipeline control due to its high temperature and corrosion resistance
Product detailed pictures：
9LDSCO-AMDN1
product video
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