RECIF SRT300F60 port single arm wafer transfer tool  

Product Manual：

RECIF SRT300F60 port single arm wafer transfer tool
1. 300mm standard wafer FOUP port handling, docking, and transportation
2. Internal single arm independent wafer grasping and conveying operation of EFEM equipment
3. Smooth handover and transfer of wafers at the entrance of the etching equipment chamber
4. Coating process front-end port clean environment sheet transfer
5. JEOL Electron Beam Testing Equipment Sample Wafer Automatic Feeding
6. Under the first level cleanliness of the dust-free workshop, there is no particle clamping and handling
7. Accurate alignment and transfer of wafers at the feed inlet of the ion implantation machine
8. Old production line, same model mechanical arm failure, overall replacement and assembly

9. Automated feeding and unloading of wafer optical inspection station ports
10. Machine online debugging, running trajectory, and grasping accuracy calibration
11. Low stress vacuum adsorption stable transfer of ultra-thin deformed wafers
12. Chip measurement process port turnover box wafer transfer docking
13. Continuous and stable round the clock picking and placing operations on the mass production line
14. Regular maintenance, disassembly, and replacement of damaged parts such as suction cups and transmissions
15. Semiconductor sorting machine port wafer diversion, collection and transportation work
RECIF SRT300F60 port single arm wafer transfer tool is mainly used for automated and precise transfer of 300mm wafer machine ports, suitable for various semiconductor process equipment supporting handling and spare parts replacement operation and maintenance

Product detailed pictures：

SRT300F60

product video

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