RENISHAW RLD10-X3-DI Fiber Laser Encoder
Product Manual：
The RENISHAW RLD10-X3-DI fiber laser encoder is a differential interferometric measurement head suitable for high-precision positioning in semiconductor vacuum.
1. Fiber optic transmission optical path, with the host and measuring head arranged separately
2. Differential measurement structure eliminates common mode errors caused by cavity deformation
3. Ultra high measurement resolution, with a minimum of 38.6pm
4. Ppb level laser frequency stabilization, stable long-term measurement values
5. Ultra low periodic nonlinear error, precise high-speed motion measurement
6. External three pin installation on the body, no need to open the cover to debug the optical path
7. Built in beam adjustment component, independent fine adjustment of pitch and yaw
8. Suitable for vacuum chamber working conditions, can be used with optical windows
9. The maximum measurement speed is 1m/s, which meets the requirements for high-speed platform movement
10. Multi channel stripe detection, stable signal in low light environment
11. Equipped with a laser shutter, it blocks the light beam during shutdown to ensure safety
12. Compact size, easy to install and fix due to the small space of the machine
13. Paired with RLU laser unit, the entire system has strong compatibility
14. Low temperature drift coefficient, small loss of accuracy in workshop temperature changing environment
15. After disassembly and reset, the optical path offset is small, and repeated calibration is simple
RENISHAW RLD10-X3-DI fiber laser encoder has high precision and is compatible with vacuum equipment. It is a core component for high-precision displacement detection of wafer machines.
Product detailed pictures：
RLD10-X3-DI
product video
Other links
5SHY4045L0003 Smart sensor
5SHX1960L0006 Smart sensor
3BHB016120R0002 Smart sensor
Other links
HC-KFS23K-S49 motor module
IC693ACC323B Gas turbine module
IC698CRE040 combustion engine card
