RENISHAW RLU20-A3-XX Fiber Laser Encoder  

Product Manual：

RENISHAW RLU20-A3-XX Fiber Laser Encoder Product Features
Introduction: RENISHAW RLU20-A3-XX is a high-precision fiber laser coding unit with high frequency stability accuracy, suitable for precise displacement detection in semiconductor vacuum equipment.
Excellent laser frequency stability with minimal long-term measurement errors
Fiber optic split transmission design, the host can be installed far away from the measurement area
Support single/dual axis measurement, compatible with multi axis platform synchronous detection
Compatible with both analog and digital standard signal output modes
Supports up to 2m/s high-speed motion measurement with no lag in response
Class 2 safe helium neon laser source, safe and compliant for use

Paired with RLD detection head, optical path calibration is fast and simple
Equipped with a panel status indicator light, the fault is intuitive and easy to troubleshoot
Built in signal processing circuit, stable and low-noise output signal
Can be connected to an external environmental compensation module to eliminate temperature and humidity measurement deviations
Compact and compact structure, space saving for cabinet installation
Flexible fiber routing, suitable for narrow cavity vacuum conditions
Multiple circuit protection to resist electromagnetic interference in the workshop
Original factory standardized interface, compatible with Renishaw’s entire range of probe heads
Long term continuous stable operation, suitable for high-precision requirements in wafer manufacturing processes
Conclusion: RENISHAW RLU20-A3-XX has high measurement accuracy and flexible installation, and is the core component of displacement feedback for high-end precision equipment.

Product detailed pictures：

RLU20-A3-XX

product video

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