Sinfonia Technology SCE92100127 Dual Arm Wafer Handling Robot
Product Manual：
Sinfonia Technology SCE92100127 Dual Arm Wafer Handling Robot
1. Sinfonia Technology SCE92100127 is a semiconductor dual arm wafer handling robot
2. Dual independent robotic arms that can alternately complete wafer retrieval and placement
3. Resin material end gripper reduces particle generation
4. Servo closed-loop control, high positioning accuracy
5. Built in wafer detection, identifying whether the wafer is offset or not
6. Vacuum adsorption method, stable clamping of silicon wafers
7. Suitable for working in vacuum chambers and EFEM environments
8. Collision detection protection to prevent wafer breakage and damage
9. Alternating dual arm operation to improve equipment transmission speed
10. Bus interface docking with semiconductor equipment master control
11. Modular structure, easy to disassemble and maintain components
12. Clean grade mechanical design to meet the requirements of dust-free workshops
13. Support long-term uninterrupted mass production operation
14. Output alarm status for easy troubleshooting
15. Sinfonia Technology SCE92100127 is compatible with 300mm wafer transfer
Sinfonia Technology SCE92100127 dual arm wafer handling robot is used for high-speed transfer of wafers inside semiconductor equipment and material exchange in chambers.
Product detailed pictures：
SCE92100127
product video
Other links
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