SMC 0190-19293 circulating chiller
Product Manual：
SMC 0190-19293 circulating chiller
1. SMC 0190-19293 is a specialized circulating chiller for semiconductor equipment
2. Closed loop liquid cooling cycle, stable control of equipment thermal load temperature
3. High temperature control accuracy ensures temperature consistency of process components
4. Support deionized water circulation and adapt to semiconductor cleanliness requirements
5. Comes with real-time monitoring of traffic and pressure
6. Multiple protections for low liquid level, over temperature, and overload
7. Digital panel displaying temperature, pressure, and operating parameters
8. Support communication docking with device master control, remote monitoring and alarm
9. Air cooled cooling structure, high integration of the whole machine
10. Built in filter to filter impurities in the circulating fluid
11. Capable of fault self checking and outputting alarm codes
12. Compact body, easy to install inside the cabinet
13. Low vibration and low noise, suitable for clean workshops
14. Support 24/7 uninterrupted mass production operation
15. SMC 0190-19293 matches AMAT process equipment for heat dissipation
SMC 0190-19293 circulating chiller is used in semiconductor process equipment to provide constant temperature cooling for heating components such as chambers and radio frequencies.
Product detailed pictures：
0190-19293
product video
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