SMC INR-495-006 Circulating Temperature Controller  

Product Manual：

SMC INR-495-006 Circulating Temperature Controller
1. SMC INR-495-006 Semiconductor Closed Loop Temperature Control Equipment
2. Integrated cooling and heating, stable control of load temperature
3. Support deionized water circulation and adapt to ultra clean processes
4. Variable frequency pump body, adjustable flow and pressure
5. Real time monitoring of temperature, flow rate, and liquid level parameters
6. Multiple protections against overheating, low flow rate, and low liquid level
7. Digital panel, visually displaying operating parameters
8. RS232 communication, remote monitoring through device master control

9. Built in filter to intercept impurities in the circulating fluid
10. Fault self check, output alarm code for easy troubleshooting
11. Air cooled heat dissipation, high integration of the whole machine
12. Complies with SEMI semiconductor industry standards
13. Low noise, suitable for clean workshop environment
14. Support 24/7 uninterrupted mass production operation
15. SMC INR-495-006 is used for heat dissipation of process chambers and RF components
SMC INR-495-006 cyclic temperature controller is a semiconductor equipment constant temperature cooling unit that provides stable cyclic temperature control for process components.

Product detailed pictures：

INR-495-006

product video

Other links

PPC905AE101 3BHE014070R0101 Control Card
UAC383AE01 HIEE3008900001 Input Module
UAC389AE02 HIEE30888R0002 Logic Controller

Other links

IS200TDBTH6ACD General electric (ge) module
NU8976A99 HIER466665R0099 HIEE320693R0001 module
PPC380AE102 HIEE300885R0102 Sequence control module