SMC INR-498-016C Circulating Refrigerator
Product Manual：
#SMC INR-498-016C Circulating Refrigerator
1. Semiconductor etching machine RF power supply constant temperature heat dissipation and temperature control
2. PECVD coating chamber process medium circulation constant temperature cooling
3. Precision constant temperature control and heat dissipation of lithography machine optical lens
4. Turbomolecular pump operates for a long time to cool down, stabilize pressure, and cool down
5. Temperature stability control of wafer probe testing platform
6. RF matching device, generator working heat dissipation constant temperature guarantee
7. Circulating cooling of vacuum valves and air circuit temperature control components
8. Third generation semiconductor process equipment heat source constant temperature heat dissipation
9. Laser processing equipment, optical path module, precise temperature control and cooling
10. Integrated heat dissipation and temperature control of industrial control cabinet in clean workshop
11. Constant temperature cooling operation of core components of ion implantation machine
12. The core component of the helium leak detector maintains constant temperature and heat dissipation
13. Stable temperature control of heat source for laboratory vacuum process equipment
14. Lithium ion high-precision coating equipment circulating liquid temperature control
15. This SMC INR-498-016C closed-loop refrigeration system has high temperature control accuracy, clean and corrosion-resistant pipelines, and is suitable for continuous heat dissipation and voltage stabilization in dust-free semiconductor working conditions
Overall, SMC INR-498-016C operates stably with low noise, comes with multiple overload protections, effectively suppresses equipment temperature drift, and ensures stable operation of precision processes.
Product detailed pictures：
INR-498-016C
product video
Other links
3DH03164AB transmitter module
76-0300-02 Controller Module
3DH03218ADAA power amplifier module
Other links
3ASC25H208 DATX100 Digital input card
3ASC25H216A DATX132 Digital output card
3ASC25H219B DATX133 Digital output module
