TEL 2L80-003024-V1 Controller Module
Product Manual：
TEL 2L80-003024-V1 Controller Module
Introduction: TEL 2L80-003024-V1 Tokyo Electronic Semiconductor Machine Main Control PCB Module, responsible for coordinating equipment process logic and signal interaction.
1. Responsible for the overall process calculation, execution of etching and transmission of the entire process program
2. Multi channel bus interface, compatible with IO board MFC、 Pressure sensors and other accessories
3. Strong and weak electrical zoning wiring, shielding layer reduces signal electromagnetic interference
4. Optocoupler isolation channel to prevent high-voltage impact from damaging precision circuits
5. Equipped with hardware self-test, quickly identify communication and line abnormalities and faults
6. Multiple circuit protections for overvoltage, overcurrent, and overheating
7. Rack plug-in structure, easy to disassemble, repair and replace
8. High temperature resistant and low gas release board, suitable for vacuum dust-free process chambers
9. Thickened copper foil circuit, low temperature rise during long-term full load operation
10. Reinforced solder pads, resistant to long-term equipment vibration and not easily detached from solder joints
11. Panel status indicator light, intuitive display of operational faults
12. Real time collection of various sensor data, precise feedback of cavity status
13. Low latency signal output, synchronized and stable movements of valves and robotic arms
14. Support data storage, saving device formulas and operation logs
15. The original factory is equipped with TEL series wafer equipment, and there is no need to modify the program on the machine
Conclusion: TEL 2L80-003024-V1 has stable and anti-interference operation, and is a core control spare part for semiconductor vacuum equipment.
Product detailed pictures：
2L80-003024-V1
product video
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