TEL 2L81-050094-V1 Communication Interface Module
Product Manual：
TEL 2L81-050094-V1 Communication Interface Module
Introduction: TEL 2L81-050094-V1 is a specialized signal communication board for Tokyo electronic etching/deposition equipment, responsible for sensor analog signal acquisition and transmission, machine maintenance and replacement of spare parts.
2L81-050094-V1 multi-channel analog acquisition, compatible with 4-20mA and 0-10V sensing signals
Built in A/D conversion circuit, analog signal to digital signal uploaded to the main control
Optoelectronic isolation design, isolating cavity plasma electromagnetic interference
Integrated multi-level filtering to eliminate clutter and avoid process parameter drift
Standard rack plug-in type, disassembly and replacement without changing the wiring
Channel independent indicator light, quickly locate disconnection and signal overload faults
Industrial temperature resistant components, supporting 7 × 24-hour continuous process operation
Single channel independent overload protection, local faults do not affect the entire card
Compatible with TEL factory equipment bus, stable transmission of real-time process data
Three proof coating on the board surface, dustproof and moisture-proof, suitable for dust-free clean workshops
Collect key parameters of the chamber such as pressure, temperature, and flow meter
Supporting closed-loop control to ensure gas and temperature control accuracy
Equipped with built-in power on self-test, automatically verifying the accuracy of signal acquisition
Wide temperature substrate board, stable performance under high and low temperature conditions without deviation
Factory complete electrical calibration, directly matched with the whole machine for use on the machine
Conclusion: TEL 2L81-050094-V1 is widely used in TEL semiconductor thin film and etching process equipment, with stable acquisition and strong compatibility.
Product detailed pictures：
2L81-050094-V1
product video
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