TEL 2L81-050096-V2 gas board PCB
Product Manual：
TEL 2L81-050096-V2 gas board PCB is the core circuit board for gas circuit control of Tokyo Electronic Semiconductor Machine. TEL 2L81-050096-V2 gas board PCB is compatible with gas control units for etching and thin film deposition equipment. The 15 product features are as follows:
Original LCP high-temperature resistant substrate, resistant to process high temperatures and not easily deformed or cracked
Multi layer precision wiring, separating power lines from sensing signal lines
Sinking gold surface process, resistant to trace corrosion process gas oxidation
Multi channel gas valve drive circuit, synchronously controlling the on/off of multiple process gases
Integrated flow pressure signal acquisition circuit, real-time feedback of gas path parameters
Partition copper grounding design to isolate electromagnetic interference from RF cavities
High and low voltage partition isolation, with built-in insulation slots to meet semiconductor safety regulations
Built in triple interlock protection circuit for overcurrent, short circuit, and overvoltage
Standard original horn socket, securely plugged in and out of the air circuit module
Onboard signal filtering capacitor to eliminate numerical drift of gas path sensors
Wide temperature stable operation, suitable for long-term continuous production conditions of cabinets
Dense thermal conductive via arrangement reduces the working temperature rise of power components
Support dedicated communication bus within the device, synchronously uploading pneumatic control data
Compact standard board size, easy disassembly and replacement of cabinet rails
Factory aging test for the entire machine, no need to re match the pneumatic control parameters when using it on the machine
TEL 2L81-050096-V2 gas board PCB is a specialized PCB accessory for repairing and replacing gas control systems in wafer process equipment
Product detailed pictures：
2L81-050096-V2
product video
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