TEL 3D80-000142-V8 RF automatic matching machine  

Product Manual：

TEL 3D80-000142-V8 RF automatic matching machine
Introduction: TEL original RF matching equipment, adjusts RF impedance, stabilizes semiconductor cavity process power
V8 new version control algorithm, matching response speed faster
Broadband adaptation, compatible with multiple specifications of RF power supply
Multiple protections for over power, over temperature, and standing wave exceeding limits
Built in filtering structure to reduce RF electromagnetic interference
Modular structure, easy and fast disassembly and maintenance
Operation fault indicator light, clearly visible abnormal status

Efficient heat dissipation duct, controllable temperature rise under full load for a long time
Impedance automatic real-time correction, with smaller process fluctuations
Sealed dust-proof body, suitable for dust-free workshop environment
The communication interface is complete and can be connected to the main control system of the equipment
High power endurance design, low long-term operating losses
Factory full condition aging test, high reliability
Compact size, saving installation space inside the machine
Line isolation layout to avoid interference with control boards
Specially designed to support TEL etching and coating semiconductor equipment
Conclusion: TEL 3D80-000142-V8 RF automatic matching machine accurately and stably adjusts RF impedance, ensuring continuous and stable production of semiconductor thin films and etching processes.

Product detailed pictures：

3D80-000142-V8

product video

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