TEL 3R81-000037-12 Input/Output Module  

Product Manual：

TEL 3R81-000037-12 Input/Output Module
Introduction: TEL 3R81-000037-12 is a specialized digital IO interface board for Tokyo electronic etching equipment, responsible for collecting on-site signals and outputting control commands.
Collect various digital input signals from limit switches, door switches, and sensors
Output switch signal to control solenoid valve, indicator light, safety interlock circuit
Channel with isolation circuit to resist RF plasma interference
Onboard static electricity, overcurrent, and short circuit protection to protect the main control board
High speed communication between the device backplane bus and the main control unit
Multi channel centralized IO simplifies the external wiring of the entire machine

Card slot direct insertion installation, easy disassembly and replacement of spare parts
Sinking gold solder pads, dust-free workshop with long-term stable contact
PCB sprayed with a three proof coating, dustproof, moisture-proof, and corrosion-resistant
Precise impedance wiring, signal transmission without attenuation or distortion
Reinforce the substrate to withstand continuous vibration conditions of the equipment
Reserved detection points for easy troubleshooting and maintenance
Equipped with channel status indicator light, quickly locate abnormal points
Suitable for 24V industrial standard power supply, low power consumption and small temperature rise
Used for TEL dry etching and thin film deposition semiconductor equipment
Conclusion: TEL 3R81-000037-12 signal interaction stability and anti-interference, semiconductor equipment signal acquisition and control core board.

Product detailed pictures：

3R81-000037-12

product video

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