TEL 5024-0001812-11 Electronic Flow Meter
Product Manual：
TEL 5024-0001812-11 Electronic Flow Meter
Introduction: TEL 5024-0001812-11 semiconductor process specific gas flow control component, precise control of process gas delivery volume.
High precision flow control and good process consistency
Fast response speed, no lag in flow regulation
Corrosion resistant valve body, suitable for various special process gases
Equipped with pressure compensation to eliminate the impact of air pressure fluctuations
Real time traffic numerical feedback, uploaded to the main control system
Over range automatic alarm to avoid process abnormalities
Small integrated structure, space saving for machine installation
Excellent sealing structure to prevent gas leakage
Dustproof and clean design, suitable for dust-free workshop conditions
The heat dissipation structure is complete, and it is not easy to heat up after long-term operation
Support continuous production operation for 7 × 24 hours
Standard air circuit connector, easy to disassemble and replace
Built in fault self check, quickly locate anomalies
Anti seismic body, stable operation under machine vibration
Compatible with TEL etching and thin film deposition equipment
Conclusion: TEL 5024-0001812-11 precise and durable flow control, core flow spare parts for semiconductor wet dry process.
Product detailed pictures：
5024-001812-11
product video
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