TEL 5039-000007-12 AC power module
Product Manual：
TEL 5039-000007-12 AC power module
1. TEL etching equipment dedicated AC power supply unit
2. Wide range communication input, adapted to workshop power supply fluctuations
3. Multi channel output, providing power to the machine cavity and peripherals
4. Stable output voltage and good control of ripple noise
5. Equipped with overvoltage, overcurrent, short circuit, and overheating protection
6. Built in fault detection, outputting fault alarm signals
7. Rack slot installation, compatible with equipment cabinets
8. Air cooled heat dissipation, supporting 7 × 24-hour continuous production
9. Support machine communication and return power operation status
10. Fast dynamic response to load, adapting to changes in process load
11. Anti electromagnetic interference, stable operation of lithography and etching workshop
12. High power density, saving cabinet installation space
13. Status indicator light, convenient for quick troubleshooting on site
14. Alarm signal connected to the overall safety interlock circuit of the machine
15. Standard interface, easy and convenient disassembly and replacement of spare parts
TEL 5039-000007-12 AC power module provides AC power supply for TEL semiconductor process equipment, ensuring stable power on operation of components such as chambers and robotic arms.
Product detailed pictures：
5039-000007-12
product video
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