TEL CX81-050024-V2 PCB Control Board
Product Manual：
TEL CX81-050024-V2 PCB Control Board
Introduction: TEL CX81-050024-V2 is a dedicated main control circuit board for Tokyo Electronic Etching/Thin Film Equipment, which coordinates cavity signal acquisition and action control.
Integrate multiple DI/IO channels to collect vacuum, temperature, and valve feedback signals
Optocoupler isolation circuit, isolated from radio frequency electromagnetic interference, with no clutter drift in the signal
Allocate 24V machine power supply, with built-in filtering and voltage stabilization, stable voltage output
Process timing logic, issue control instructions for valves, heating, and vacuum pumps
Multi bus interface, real-time interaction of process data with the overall controller
Multi layer shielded PCB, strong and weak electrical partition wiring, to eliminate signal crosstalk
Integrated overcurrent, short circuit, surge protection, automatic fault triggering alarm
Onboard status indicator light, quickly locate disconnection and communication faults
Specialized plug-in terminals for connecting various sensors and actuators in the cavity
Industrial wide temperature element device, long-term stable operation at high and low temperatures around the cavity
Reserve test points for easy maintenance and inspection of circuit continuity
Surface dust-proof insulation coating, suitable for dust-free semiconductor workshop environment
Standard rack slot installation, disassembly and replacement without changing the wiring
Store device operation logs for easy fault tracing and troubleshooting
Factory assembled machine online aging calibration, with good process repeatability
Conclusion: TEL CX81-050024-V2 has stable signal transmission and is a core original control spare part for TEL etching and deposition equipment.
Product detailed pictures：
CX81-050024-V2
product video
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