TEL CX81-050032-V1 interface module
Product Manual:
TEL CX81-050032-V1 interface module is used in Tokyo electronic wafer equipment to complete various signal transfer and conversion in the cavity
1. Synchronize the transmission of analog and digital process signals, and collect pressure and flow sensing data
2. Built in isolation circuit to isolate workshop electromagnetic interference caused by radio frequency and motor
3. Equipped with signal conditioning circuit to ensure stable and unbiased data acquisition
4. Multiple sets of external terminals, connected to gas valves, limit switches, and temperature detection components
5. Onboard status indicator light for quick troubleshooting of wire breakage and channel short circuit faults
6. PCB is coated with dust-free three proof coating to resist corrosion caused by process volatile gases
7. The TEL CX81-050032-V1 interface module is equipped with an original factory specific bus and interacts with the main control in real-time for data exchange
8. Integrated surge and reverse protection, making it difficult for power grid fluctuations to damage channels
9. Layered wiring distinguishes strong and weak electricity to avoid signal crosstalk and distortion
10. Cache short-term process data, short-term power outage will not lose sampling records
11. Thickened and reinforced solder pads ensure stable signal connection under continuous vibration of the production lin
13. Reserve debugging and testing points, maintenance does not require disassembling the entire cavity
14. Suitable for a wide temperature environment, the chamber operates stably under long-term high-temperature conditions
15. TEL CX81-050032-V1 interface module board size standard, saving cabinet slot space
TEL CX81-050032-V1 interface module has stable signal transmission and is a commonly used signal adapter spare part for etching and thin film equipment
Product detailed pictures:

CX81-050032-V1
product video
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