THYRACONT SMARTLINE VSP63D Vacuum Gauge
Product Manual：
THYRACONT SMARTLINE VSP63D Vacuum Gauge
THYRACONT SMARTLINE VSP63D is a German Turat Pirani vacuum transmitter that is compatible with semiconductor vacuum chambers and accurately measures coarse/fine vacuum pressure.
1. Measurement range 1000~1 × 10 ⁻⁴ mbar, DN16 KF standard vacuum interface
2. Platinum rhodium spiral filament, corrosion-resistant process gas, long service life
3. Dual stage temperature compensation, stable measurement values with small drift
4. 0-10V analog logarithmic output+RS485 digital dual communication interface
5. Built in 2 passive relays, capable of setting pressure interlock switch points
6. Response speed<100ms, real-time capture of vacuum pressure changes
7. Can withstand up to 16 bar overpressure to prevent damage to the probe due to chamber pressure relief
8. Stainless steel vacuum contact surface, suitable for dust-free and clean production line environment
9. Metal protective shell, blocking oil and gas, solvent vapor pollution sensor
10. 20-30V DC wide voltage power supply, compatible with cabinet universal power supply
11. The sensor head can be replaced separately, and calibration data storage does not require replacement of the entire machine
12. Support gas coefficient correction and adapt to various process media measurements
13. Locking 15 pin interface, not easy to loosen under long-term vibration conditions
14. The whole machine has a low power consumption of 2.5W and operates continuously for a long time with low temperature rise
15. Comes with multi-point calibration certificate at the factory, with traceable measurement data
In summary, the THYRACONT SMARTLINE VSP63D vacuum gauge has precise measurement, corrosion resistance, and overload resistance, making it a core component for vacuum monitoring of coating and etching semiconductor equipment.
Product detailed pictures：
VSP63D
product video
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