VAT 65048-JH52-AQK gate valve motor

Product Manual：

VAT 65048-JH52-AQK gate valve motor
VAT 65048-JH52-AQK is a dedicated drive motor for semiconductor vacuum swing gates, suitable for high-purity vacuum processes, and operates stably and reliably.
1. Suitable for VAT650 series vacuum swing brake, specifically designed for semiconductor vacuum equipment
2. 24V DC power supply, stable power consumption, controllable peak current
3. Balanced opening and closing speed, fast and stable switch action
4. Built in temperature control protection, not prone to overheating during long-term operation
5. Sufficient torque output, no lag in valve plate adjustment
6. High cleanliness sealed structure, no oil pollution in the vacuum chamber
7. Integrated position feedback, high precision valve position control

8. Resistant to corrosion in vacuum environment and process gas erosion
9. Small integrated structure, small installation space occupation
10. Standard communication interface, compatible with device control system
11. Double limit protection to prevent damage to the valve body due to overtravel
12. Low electromagnetic interference, does not affect the precision manufacturing process of wafers
13. Adaptation of working temperature range to vacuum chamber conditions
14. Wear resistant transmission components with low failure rate during long-term use
15. Easy disassembly and assembly, convenient daily maintenance and repair
In summary, the VAT 65048-JH52-AQK gate valve motor has high cleanliness and precise control, making it a matching driving accessory for vacuum coating and etching equipment gate valves.

Product detailed pictures：

65048-JH52-AQK

product video

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