Zygo 8020-0237-03 Controller Module
Product Manual：
Zygo 8020-0237-03 Controller Module
Introduction: Zygo 8020-0237-03 is a ZMI501A dual channel laser interferometry measurement controller used for semiconductor nanoscale displacement detection
Dual channel 24 bit high-precision acquisition, with measurement accuracy reaching nanometer level
Compatible with Zygo series laser heads, real-time analysis of interferometric displacement signals
Metal fully shielded shell, isolating workshop RF electromagnetic interference
Multiple sets of standard DB and RF interfaces, connecting laser and industrial control host
Built in active heat dissipation grille, not prone to heat accumulation when fully loaded for a long time
DC standard power supply, stable current, low tolerance for voltage fluctuations
Onboard signal filtering circuit, measurement data without clutter drift
Equipped with a hardware fault indicator light, it quickly detects communication and optical path abnormalities
Support upper computer communication, real-time transmission of displacement and vibration measurement data
Integrated static and surge protection to protect internal precision measurement chips
Bottom standard installation holes, both cabinets and equipment countertops can be fixed
0-40 ℃ wide temperature operation, suitable for dust-free production lines and optical laboratories
2-axis synchronous measurement to meet the platform’s dual axis positioning detection requirements
Factory calibration of the entire machine, stable continuous measurement for 7 × 24 hours
Widely used in wafer lithography machines and precision motion platform positioning and detection
Conclusion: Zygo 8020-0237-03 has high measurement accuracy and is a core spare part for semiconductor precision optical testing
Product detailed pictures：
8020-0237-03
product video
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