РЧ-согласователь Daihen RMN-20E2-V

Руководство по продукту：

РЧ-согласователь Daihen RMN-20E2-V
Введение: Daihen RMN-20E2-V semiconductor specific automatic RF matching device, suitable for etching and coating machines, responsible for automatic adjustment of RF impedance.
Suitable for 20kW power RF power supply, standard 13.56MHz frequency band
High speed automatic tuning, quickly offsetting plasma impedance fluctuations
Significantly reduce reflected power to protect the RF host from damage
Built in high-precision capacitor and inductor adjustment module, with high matching accuracy
Metal sealed chamber, suitable for clean working conditions in dust-free workshops
Equipped with a water-cooling heat dissipation structure, it can work continuously under high loads without heating up
Цифровой интерфейс связи, capable of real-time linkage with the main control of the machine

Real time collection of standing wave data, rapid alarm prompt for abnormalities
Multiple safety protections against overheating, сверхток, and high standing waves
Copper RF channel with lower power transmission loss
Process parameter power-off memory, restart without recalibration
Standardized docking port, легкая разборка и замена, экономия времени
Конструкция против электромагнитных помех, stable operation of multiple RF devices in the same cabinet
Compact integrated structure, экономия места при установке шкафа
Original factory program, matching curve to adapt semiconductor plasma process
Заключение: Daihen RMN-20E2-V has fast matching response and stable power transmission, making it a core RF spare part for thin film and etching equipment.

Подробные фотографии продукта：

RMN-20E2-V

видео о продукте

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