FUJIKIN FCSP8202D-4CW2-F139BF39B Mass Flow Controller
Руководство по продукту：
FUJIKIN FCSP8202D-4CW2-F139BF39B Mass Flow Controller
Введение: Fuji Gold FCSP series semiconductor specific MFC, precise control of process gas flow.
1. FUJIKIN FCSP8202D-4CW2-F139BF39B has high flow control accuracy and stable process
2. Resistant to intake pressure fluctuations, flow rate values are less likely to drift
3. Быстрая скорость ответа, complete flow adjustment within 0.5 seconds
4. Installation at any angle, placement does not affect measurement accuracy
5. Support multiple process gases and adapt to different processes
6. Equipped with built-in flow self check, quickly troubleshoot gas path faults
7. Built in overvoltage protection to prevent impact damage to components
8. Low emission stainless steel valve body, suitable for dust-free vacuum environment
9. Solid state sensing structure, способен выдерживать длительную вибрацию оборудования
10. Стандартный интерфейс связи, capable of directly connecting to the device host
11. Valve control regulation is stable, without interference from air flow pulses
12. Небольшая интегрированная структура, экономия места при установке шкафа
13. Standard sealed joint, air path sealing without leakage
14. Работа с низким энергопотреблением, низкое тепловыделение при длительной эксплуатации
15. Compatible with wafer etching and deposition equipment, easy to calibrate on the machine
Заключение: FUJIKIN FCSP8202D-4CW2-F139BF39B has stable and clean flow control, and is a core spare part for semiconductor gas supply.
Подробные фотографии продукта：
FCSP8202D-4CW2 -F139BF39B
видео о продукте
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