Модуль контроллера Kokusai Electric CX1231
Руководство по продукту：
Kokusai Electric CX1231 Vertron III DD-803V Controller Module (Упрощенный 15 Points)
1. Adapt to the Vertron III series of international electrical bulk thin film deposition machines, process action control board
2. Coordinate chamber temperature, gas flow rate, vacuum valve, and stage transmission logic control
3. Multi channel digital I/O acquisition of door lock, давление, emergency stop safety interlock signals
4. Optocoupler isolates strong and weak electricity, isolates electromagnetic interference from plasma chambers
5. Analog closed-loop regulation of temperature zone and gas path pressure, high process stability
6. On board storage, storing multiple sets of wafer film-forming formula parameters
7. Dedicated backplane bus communication, high-speed data exchange with the main control of the entire machine
8. Independent status indicator lights for each channel, quickly locate sensor/valve faults
9. Hardware safety circuit, immediately cut off the gas source for heating in case of vacuum/door abnormality
10. Multi layer protection against overcurrent, статическое электричество, и всплеск, with no downtime for single channel faults
11. Metal reinforced PCB, earthquake resistant and suitable for long-term vibration conditions in mass production workshops
12. Clean room with wide temperature and stable operation, 24-hour uninterrupted production
13. Standard slot directly inserted into the cabinet backplane, disassembly and replacement do not require wiring changes
14. Fault code cache, quick diagnosis of board and peripheral issues for maintenance
15. Same model spare parts can be replaced directly without the need to re debug the machine process program
Kokusai CX1231 is a core process control spare part for semiconductor batch ALD/CVD film formation equipment.
Подробные фотографии продукта：
CX1231
видео о продукте
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