NIHON KOSHUHA AMC-T20-V-V RF Controller
Руководство по продукту:
NIHON KOSHUHA AMC-T20-V-V RF Controller
Введение: NIHON KOSHUHA AMC-T20-V-V is a specialized RF controller for semiconductor plasma equipment, with stable power regulation and suitable for long-term process production of coating and etching equipment.
Accurate adjustment of RF output power with minimal power fluctuations
Real time monitoring of standing waves and automatic reduction of reflected power
Integrated multiple safety protections against overheating, сверхток, and overload
Anti electromagnetic interference circuit, stable operation in complex production line environments
Digital display of operating parameters, clear visibility of operating status
Standard communication interface, compatible with device control system
Modular construction, easy disassembly and replacement of faulty components
Compatible with high-frequency RF power supplies of the same series, with strong original factory compatibility
Rapid response to temperature rise and drop, rapid adaptation to load changes
Metal sealed shell, пыленепроницаемый и влагозащищенный, suitable for clean workshops
Power on automatic self check, quickly troubleshoot hardware faults in the circuit
Support multiple sets of process parameter storage, convenient switching of processes
Low power consumption operation, low heat generation during long-term operation
Wide temperature working range, reliable continuous operation of constant temperature production line
Equipped with fault recording function for easy maintenance and repair in the future
Заключение: NIHON KOSHUHA AMC-T20-V-V has comprehensive protection and stable regulation, and is a core RF control spare part for semiconductor plasma processes.
Подробные фотографии продукта:

AMC-T20-V-V
видео о продукте
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