TEL 3381-001098-13 Electronic board lighting control module
Руководство по продукту：
1. Basic Information
Manufacturer: Tokyo Electron (TEL)
Модель: 3381-001098-13 (referred to as ILLUMInation Control BOARD)
Тип: Lighting driver/dimming control board (electronic module)
Compatible devices: TEL Clean Track, Unity, Centura and other platforms
Сценарии применения: Process chamber observation lights, EFEM/Load Port lighting, visual system fill lighting
Status: Active spare parts, original/refurbished in circulation, price approximately $1200- $2500
2. Hardware specifications
Board type: Standard TEL dedicated PCB, 9U size, multi-layer FR-4 board
Источник питания: DC 24V ± 10% input; Output DC 5V/12V (compatible with lighting fixtures)
Output channel: 4-8 independent dimming channels (PWM constant current drive)
Dimming mode: 0-10V analog/RS-485 communication/PWM signal
Protection mechanism: automatic protection against overcurrent, перенапряжение, overtemperature, and short circuit
Интерфейс связи: RS-485 (Модбус), digital I/O (interlock/status feedback)
Среда: Temperature range of 5-45 ℃; Humidity 10% -90% RH (no condensation); Cleanroom Class 1 adaptation
3. Core functions
Lighting power management: providing stable power supply and switch control for cavity/machine lighting fixtures
High precision dimming: 0-100% brightness continuously adjustable, suitable for visual inspection and process observation
Status monitoring and feedback: Real time reporting of light source faults, сверхток, and overheating signals to the host
Safety interlock: door interlock, emergency stop linkage, automatically cuts off lighting in case of abnormality
Multi mode control: local manual, remote automatic, timing linkage (matching device process)
Подробные фотографии продукта：
3381-001098-13
видео о продукте
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