TEL 3B87-003543-11 Heater Assembly
Руководство по продукту：
Brand: ТЕЛ. (Tokyo Electronics)
Модель: 3B87-003543-11
Тип: Precision Heater Assembly
Приложение: Wafer heating/temperature compensation unit for TEL lithography/etching/deposition equipment
Power: several hundred watts (typical 200-800W)
Voltage: 200-240В переменного тока (single-phase)
Temperature control: High precision (± 0.1 ℃), suitable for semiconductor processes
Материал: Stainless steel/special alloy cavity, устойчивый к коррозии, temperature resistant
Интерфейс: Dedicated power supply+temperature control signal connector, подключи и играй
Среда: Cleanroom Class 1, compatible with high vacuum
Основные характеристики
Semiconductor grade precision temperature control ensures wafer process uniformity and yield
Integrated heating+sensing+temperature control, integrated module, reducing on-site debugging
Long life and anti-aging, suitable for 24-hour continuous production
Fast thermal response, fast temperature rise and fall speed, and increased equipment capacity
Vacuum/cleanroom specific, no particle release, compliant with SEMI standards
Original factory matching design, seamlessly compatible with TEL equipment
Fault self diagnosis with temperature/power anomaly monitoring
Компактная структура, suitable for small spaces inside equipment
Leak proof sealing, suitable for process gas/chemical environments
Low power consumption and high efficiency, сокращение эксплуатационных расходов
Standardized interfaces, легкая замена, и сокращение времени простоя
Tolerant to harsh environments, resistant to vibration and electromagnetic interference
Long term supply support, semiconductor spare parts lifecycle guarantee
Full factory inspection, 100% power/temperature calibration
Compatible with multiple processes, universal in photolithography, etching, deposition and other processes
Подробные фотографии продукта：
3B87-003543-11
видео о продукте
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