Yaskawa 0190-41805 предварительный выравниватель пластин
Руководство по продукту：
Yaskawa 0190-41805 предварительный выравниватель пластин
Yaskawa 0190-41805 is a 300mm wafer pre alignment module adapted by Yaskawa for AMAT semiconductor equipment, used for precise correction of wafer center and notch.
Compatible with 300mm standard silicon wafers and matched with application material etching and deposition equipment
Vacuum suction cup supports wafers, PEEK contact material reduces particle contamination
High precision linear array sensor for rapid identification of wafer notches and edges
The center positioning error is extremely small, and the angle correction accuracy is high
Built in DD direct drive rotary motor, operates with low vibration and no shaking
Short time consumption for a single complete alignment process, improving production line throughput efficiency
Fully enclosed clean structure, meeting the ISO1 cleanliness standard for dust-free workshops
Integrated servo control unit, which can be directly connected to the main control communication of the equipment
Real time vacuum pressure monitoring, automatic shutdown protection when there is no vacuum
Multiple limit sensing to prevent wafer offset, collision, and damage
Metal rust proof body, corrosion-resistant and adaptable to the surrounding environment
Standard interface and installation hole position, can be directly replaced with original parts without the need for modification
Включение автоматической самопроверки, quickly identify sensor and vacuum faults
Low dust mechanical structure reduces wafer defect yield loss
Long life wear-resistant accessories reduce the frequency of production line downtime and maintenance
Заключение: Yaskawa 0190-41805 wafer pre aligner has precise calibration and high cleanliness, and is the core calibration component of 300mm wafer transfer system.
Подробные фотографии продукта：
0190-41805
видео о продукте
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